Aerosol assisted atmospheric pressure plasma jet for a high deposition rate of silica-like thin films

This paper investigated thin films deposition processes of silica-like based on the injection liquid droplets in Atmospheric Pressure Plasma Jet–APPJ operated open air. An aerosol hexamethyldisilane is produced by a syringe-pump and injected nitrogen post-discharge for different precursor carrier gas flow rates. For high flow, this process enables to form without addition oxygen plasma phase. Furthermore, offers film dynamic rate from 500 1400 nm.m.min −1 depending structure departs organosilicon layers lowest These evolutions are attributed plasma–droplets interactions related transport droplets, evaporation polymerization.